The NFF provides state-of-the-art instruments for designing, fabricating, characterizing and testing of complex nano and microscale structures and devices. The NFF is housed within a 2500 square feet ISO-5 cleanroom inside the experimental hall at CAMD. The facility is open to all LSU and external (industry) researchers. Cleanroom staff support is available for training, process consultation and collaboration on new process development. Visit the How to become a user page for more details.
Cleanroom Events
May 2023
LSU engineering students completed the first "Special Topics Course" offered at the NFF
April 2023
The Oxford PlasmaLab 100 (ICP/DRIE) - "Bosch Process" upgrade completed
January 2023
The NFF welcomes the addition of the J.A. Woollam IR-Vase Mark II Ellipsometer to its fleet of characterization tools. The IR -Vase covers the wide spectral range from 1.7 - 30 microns (333 -5900 wavenumbers)
March 2022
Rapid Thermal Processing capabilities now available with the installation of the Jipelec JetFirst RTP/RTA
January 2022
The neaSpec Scanning Near-Field Optical Microscope is now operational. The microscope combines nanoscale imaging and spectroscopy all in one tool
October 2021
Kurt J. Lesker Dual Chamber Sputtering System installation completed
News
Nanofabrication director awarded enhancement grant from the Louisiana Board of Regents bringing (PECVD) plasma enhanced chemical vapor deposition capabilities to LSU. View LinkedIn post for more details
Polarimetry data collected at the NFF instrumental in the development of an ultraviolet metasurface that can detect weak biomolecular activity, aiding in the discovery of neurodegenerative diseases at the early stages. Click the link for the full article Phys.org/October 2022
LSU Chemical Engineering PhD student's SEM images taken at the NFF featured on the cover of the July/August 2022 edition of the "Journal of Vacuum Science & Technology" Click this link for the full paper.
Nanofabrication Facility featured in LSU Chemical Engineering promo video