Nanofabrication Equipment

Lithography Equipment

• DUV Exposure Station and Aligner

Metrology Equipment

• Ellipsometer
• Reflectometer
• Atomic Force Microscope (AFM)
• Scanning Electron Microscope (SEM)
• NIR-UV-VIS Spectrophotometer
• Measuroscope
• Optical Microscope
• Plasma etching (Deep Reactive Ion Etching)
• Analytic Probe
• Contact Profilometer
• Optical Profilometer 

Processing Equipment

• Plasma Asher
• Hot Plate Station
• Non-vacuum Oven
• Denton Plasma Coating
• Vacuum Oven
• Chemical Hoods