Beamlines

Micromachining X-ray Lithography

Micromachining I (XRLM1) Port 2A, 10 mrad (Updated)

  • X-ray lithography beamline for microfabrication.
  • Two mode of operation, "white" and "mirror" light.
  • Two Beryllium windows, 100 µm and 120 µm.
  • Distance source point - mask plane 10.35 meter.
  • DEX 02 scanner, from Jenoptik GmbH.

Micromachining II (XRLM2), Port 2B, 10 mrad (Updated)

  • X-ray lithography beamline for microfabrication.
  • Full spectrum, "white light" beamline.
  • Two Beryllium windows, 250 µm and 150µm thick.
  • Distance source point - mask plane 10.7 meter.
  • DEX 01 scanner, from Jenoptik GmbH.

* XRLM 1 & 2 are jointly operated with the IfM Organization at LA Tech University.

Micromachining IV (XRLM4)Wiggler Port 3A, 6.5 mrad

  • X-ray lithography beamline for microfabrication.
  • Wavelength shifter spectrum, "white light" beamline.
  • One Beryllium window, 175 µm thick.
  • High-energy X-ray spectrum; deep-etch capability.
  • DEX 03 scanner, from Jenoptik GmbH

IR, Vacuum UV, & Soft X-ray

3-meter Normal Incidence Monochromator (NIM), Port 3B, 70 mrad

  • High-resolution, high-flux beamline, range 2 - 50 eV,
    resolving power 10,000 (high energy) - 50,000 (low energy)
  • Dedicated SES-200 analyzer endstation for ARUPS measurement.
  • A “second tail” allows deflection of the highly resolved monochromatic beam to a second, user-selected or provided, endstation.
  • Click here (pdf) for more details.

Dr. Cherice Evans Blog using NIM for research Summer 2016

 

Varied-Line-Space Plane Grating Monochromator Beamline (VLSPGM), Port 4A, 7 mrad

  • High-resolution soft x-ray beamline, range 200 -1200 eV
  • Resolving power 5000
  • NEXAFS, XAS, MCD measurements
  • Click here(pdf) for more details.

ex. of research done on the PGM beamline: surface science.

5-meter Toroidal Grating Monochromator Beamline (5m-TGM), Port 4B, 6 mrad

  • High-resolution VUV beamline, range 25 – 240 eV
  • Resolving power 800 at 200 eV
  • ARUPS, LEED, Dual-anode X-ray source
  • XAS measurements
  • Omicron EA-125 photoelectron analyzer for ARUPS and XPS
  • Click here (pdf) for more details.

Infrared Microspectroscopy Beamline (IR), Port 1A, 50 mrad

  • Nicolet FT-IR spectrometer and Microscope, range 400 – 11700 cm-1
  • Transmission and reflection modes
  • Infrared 1D and 2D mapping with spatial resolution 10 µm
  • Click here(pdf) for more details.

X-ray

Protein Crystallography MAD Beamline (GCPCC)

  • Energy range 7.0 - 17.5 keV with resolution of 3 eV, suitable for macromolecular crystallography MAD phasing.
    Click here for further details.

Tomography Beamline

  • Energy range 6.0 - 35 keV with resolution 1-3%

SAXS - Small Angle X-ray Scattering Beamline

  • Double-crystal monochromator with energy range from ~5-11KeV
  • Online 200mmx200mm multiwire gas detector
  • Sample to detector distance adjustable from 0.9m to 4.9m
  • Click here for further details.

X-ray Absorption Spectroscopy Beamlines

  • LEXAS: Low Energy X-ray Absorption Spectroscopy
    Energy range: 1.7 - 5 keV
  • DCM: Double Crystal Monochromator Beamline
    Energy range: 1.7 - 11 keV
  • HEXAS: High Energy X-ray Absorption Spectroscopy
    Energy range: 5 - 30 keV
  • Click here for further details.
 

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