Hitachi S-4500II Field Emission SEM with EDAX

photo: sem 1

photo: sem dax

(For training or questions, please contact Shaloma Malveaux, at 578-9343)

The Hitachi S-4500 II cold field emission scanning electron microscope is used to image features at magnification ranging from 20x to 500,000x.

Resolution depends on operating conditions:

  • 1.5 nm (at 15 kV accelerating voltage, WD 4 mm)
  • 4.0 nm (at 1kv accelerating voltage, WD 3mm).

Accelerating voltage can vary continuously from 0.5 kV for resist imaging to 30 kV for EDS detection and metallic surface imaging.

Stage motion ranges:

  • X: 0 to 100 mm
  • Y: 0 to 50 mm
  • Z: 3 to 28 mm (continuous)
  • Tilt: -5º to +45º
  • Rotation: 360º (continuous)

The image capture software was updated in 2003 with Quartz PCI version 5.1.

The EDAX detector is used for advanced materials characterization of energy dispersive X-ray microanalysis (EDS).

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