Microfabrication CAMD Cleanroom Chemical List

Chemicals on this list are routine use chemicals in the CAMD Cleanroom and are available to users for general use. All others (*) are approved for use in the cleanroom but are not provided by CAMD. You must purchase from your department and store at the facility.   If there are any other chemicals that you need to use that are not on this list, contact Shaloma Malveaux, smalvea@lsu.edu, 225-578-9343 for approval.

Resists

*AZ 1505
*AZ 1512
*AZ 1518

Shipley
--1805
Shipley
--1808
*Shipley 1827

*SU* Resist
*SU8 2000 Series
*SPR 2200 Series

PMMA 9%, 10%, 12% (Anisole)

*NR9-3000

Developers

*AZ 400k

Shipley 351 Concentrate Solution
*Shipley MF 321, 322 (ion free)
*Shipley MF CD series (ion free)

SU8 Developer

GG(Pmma Developer)

RD-6

Solvents

Acetone
Iso Propyl Alcohol
Methyl Isobutyl Ketone
Trichloroethylene
Methanol
Morpholine
Ethanolamine

Acids (requires training for use)

Acetic
Hydrochloric
Sulfuric
Hydrofluric 38%
Buffered Oxide Etch 10:1

Miscellaneous

Sodium Hydroxide
Potassium Hydroxide
Methyl Methacrylate (powder)
Benzoyl Peroxide
Hydrogen Peroxide
Ammonium Hydroxide
Gold Etchant
Chromium Etchant
HDMS(AP010) Adhesion Promoter
HDMS(AP130) Adhesion Promoter
Sylgard (PDMS)