Tencor Alpha-Step 500 Surface Profiler

photo: talpha

photo: tencor stage

The Tencor Profiler is a metrology tool that generates a 2 dimensional profile of the surface of a sample.  This is done by a stylus, which touches the surface of a sample and runs across a prescribed length.

Accuracies for the three different profile ranges are:

  • 13 um range = +/- 25 A
  • 300 um range = +/- 50 A
  • 2 mm range = +/- 200 A

Tencor P-2 Long Scan Profiler

The Tencor Profiler is a metrology tool that generates a 2 dimensional profile of the surface of a sample. This is done by a stylus, which touches the surface of a sample and is scanned across a prescribed length. Step heights and widths of structure can be measured in this way.

This scanner differs from the Alpha step through longer scan lengths and motorized stage.

photo: long scan