Facilities

Beamlines

Micromachining X-ray Lithography

IR, Vacuum UV, & Soft X-ray

  • 3-meter Normal Incidence Monochromator (NIM), Port 3B, 70 mrad
  • Varied-Line-Space Plane Grating Monochromator Beamline (VLSPGM), Port 4A, 7 mrad
  • 5-meter Toroidal Grating Monochromator Beamline (5m-TGM), Port 4B, 6 mrad
  • Infrared Microspectroscopy Beamline (IR), Port 1A, 50 mrad

X-ray

Microfabrication Cleanroom Equipment

  • cleanroom
  • parylene deposition
  • polishing
  • fly cutting
  • Electroplating
  • hot embossing

Ancillary Facilities

  • 3-D printing
  • Biological Sample Preparation Lab
    • anaerobic chamber
    • cold room
  • Inorganic Sample Preparation Lab

Quick Links

Ring Current

Microfabrication

Safety

User Portal

Contact Us

Louisiana State University
Center for Advanced Microstructures & Devices
6980 Jefferson Hwy.
Baton Rouge, LA 70806
(225) 578-8887 Tel. (main office)
(225) 578-6954 Fax

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