Facilities
Beamlines
Micromachining X-ray Lithography
- Micromachining I (XRLM1) Port 2A, 10 mrad
- Micromachining II (XRLM2), Port 2B, 10 mrad
- Micromachining IV (XRLM4)Wavelength Shifter Port 3A, 6.5 mrad
IR, Vacuum UV, & Soft X-ray
- 3-meter Normal Incidence Monochromator (NIM), Port 3B, 70 mrad
- Varied-Line-Space Plane Grating Monochromator Beamline (VLSPGM), Port 4A, 7 mrad
- 5-meter Toroidal Grating Monochromator Beamline (5m-TGM), Port 4B, 6 mrad
- Infrared Microspectroscopy Beamline (IR), Port 1A, 50 mrad
X-ray
- PX Beamline
- Tomography Beamline
- SAXS - Small Angle X-ray Scattering Beamline
- X-ray Absorption Spectroscopy Beamlines
Microfabrication Cleanroom Equipment
- cleanroom
- parylene deposition
- polishing
- fly cutting
- Electroplating
- hot embossing
Ancillary Facilities
- 3-D printing
- Biological Sample Preparation Lab
- anaerobic chamber
- cold room
- Inorganic Sample Preparation Lab