XRLM 1 Beamline (Port 2A) 

Characteristics:

This beamline can operate in two modes - a 'white' light mode without any optics and a 'mirror' light mode.

'White' light mode

  • 'White' spectrum, no optics, 2 Beryllium windows, 1st window, 100 µm thick , 2ndwindow 120 µm thick
  • transmitted bandpass spectrum: 2.0 keV – 7 keV (10 keV @ 1.45 GeV)
  • vertically integrated power incident on to the mask (100 mA): 314 mW/mrad @ 1.3 GeV, 730 mW/mrad horizontal acceptance @ 1.45 GeV
  • source to exposure plane distance: 10.35 m.
  • horizontal acceptance at mask plane: 10 milliradians
  • horizontal beam width at the exposure plane: 104 mm.

'Mirror' light mode

  • 2 Si mirrors, coated with one layer of Cr (Cr thickness > 120 nm)
  • 1st mirror is water-cooled, 2nd mirror is un-cooled
  • grazing angle: 0.5 deg – 1.2 deg corresponding to 8.73 mrad – 21 mrad
  • distance source point – center 1st mirror: ~ 3 m
  • horizontal acceptance 1st mirror: ~ 14 mrad

Scanner and Filter

  • Filters:
    • Currently the following filters can be used:

Filter 2:        6.8 µm Al
Filter 3:        6.7 µm Al
Filter 4:        6.3 µm Al
Filter 5:        5.8 µm Al
Filter 6:      61.0 µm Al
Filter 7:      50.0 µm Kapton
Filter 8:    100.0 µm Kapton
Filter 9:      42.0 µm Graphite
Filter 10:    42.0 µm Graphite
Filter 11:    42.0 µm Graphite

Al:              ρ= 2.70 g/ccm
Kapton:       ρ= 1.42 g/ccm
Graphite:     ρ= 2.25 g/ccm

    • Scanner: DEX02 from Jenoptik GmbH
      • maximum length of vertical scan is 100 mm.
      • maximum velocity is 50 mm/s
      • mask formats are 5" standard NIST, modified NIST, large format, and
      • 4" stainless steel ring
      • Substrate: standard 4" wafer and 4.75" stainless steel mold insert blank


      Special features: dark chamber environment, tilt/rotate option, aligned exposure option and mask/substrate cooling capabilities.


Power Flux Spectra of XRLM1 Beamline in 'White' light mode

photo: xrlm1 spectra

Beamline Drawing (side-view)

photo: side view

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Personnel

Beamline Manager

Dawit Yemane
CAMD
225-578-4618

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